Experimental investigation and computational modeling of hot filament diamond chemical vapor deposition
In: The Journal of Chemical Physics (JCP), Vol. 107 (1997), No. 15, pp. 5918 - 5928
1997article/chapter in journal
Mechanical EngineeringFaculty of Engineering
Related: 1 publication(s)
Title in English:
Experimental investigation and computational modeling of hot filament diamond chemical vapor deposition
Author:
Zumbach, Volker;Schäfer, Jörg;Tobai, Jens;Ridder, Michael;Dreier, ThomasUDE
- LSF ID
- 47223
- ORCID
- 0000-0001-8313-4992
- Other
- connected with university
Year of publication:
1997
DOI
Language of text:
English