Finder, C.; Mayer, Christian; Schulz, H.; Scheer, H.c.; Fink, M.; Pfeiffer, K.:
Non-contact fluorescence measurements for inspection and imprint depth control in nanoimprint lithography
In: GMM Fachbericht - Berlin: VDE-Verlag, 2002, S. 195
2002Buchaufsatz/Kapitel in SammelwerkChemie
Titel:
Non-contact fluorescence measurements for inspection and imprint depth control in nanoimprint lithography
Autor(in):
Finder, C.; Mayer, ChristianLSF; Schulz, H.LSF; Scheer, H.c.; Fink, M.; Pfeiffer, K.
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