Non-contact fluorescence measurements for inspection and imprint depth control in nanoimprint lithography
In: Proceedings / 18th European Conference on Mask Technology for Integrated Circuits and Microcomponents / Behringer, Uwe F. W. (Eds.). - 18th European Conference on Mask Technology for Integrated Circuits and Microcomponents : 15 - 16 November 2002, Munich, Germany - Bellingham, Wash.: SPIE, 2002 - (Proceedings / SPIE, International Society for Optical Engineering ; 4764), p. 195
2002book article/chapter in Proceedings
Chemistry
Title in English:
Non-contact fluorescence measurements for inspection and imprint depth control in nanoimprint lithography
Author:
Finder, C.;Mayer, ChristianUDE
- GND
- 100307078
- LSF ID
- 501
- ORCID
- 0000-0003-1681-0553
- Other
- connected with university
Language of text:
English