Kruse, Matthias; Franzka, Steffen; Schmid, Guenter:
Nanostructured silicon surfaces via nanoporous alumina.
In: Chemical Communications (Cambridge, United Kingdom), Heft 12, S. 1333 - 1335
2003Artikel/Aufsatz in ZeitschriftChemie
Titel:
Nanostructured silicon surfaces via nanoporous alumina.
Autor(in):
Kruse, Matthias; Franzka, SteffenLSF; Schmid, GuenterLSF
Erscheinungsjahr
2003

Abstract:

Nanostructured silicon surfaces are generated using nanoporous alumina membranes as stamps to imprint PMMA films on silicon, followed by reactive ion etching.