Bae, Seong-Woo; Schiemann, Klaus; Mertin, Wolfgang; Kubalek, Erich; Maywald, Martin:
A new bifunctional topography and current probe for scanning force microscopy testing of integrated circuits
In: Microelectronics Reliability, Vol. Vol. 39 (1999), No. 6-7, pp. 975 - 980
1999article/chapter in journal
Electrical Engineering and Information TechnologyPhysics (incl. Astronomy)Materials Engineering
Related: 1 publication(s)
Title:
A new bifunctional topography and current probe for scanning force microscopy testing of integrated circuits
Author:
Bae, Seong-WooUDE
LSF ID
1445
Other
connected with university
;Schiemann, Klaus;Mertin, WolfgangUDE
LSF ID
1452
ORCID
0000-0001-6792-6033ORCID iD
Other
connected with university
;Kubalek, ErichUDE
LSF ID
1175
Other
connected with university
;Maywald, Martin
Year of publication:
1999
Appears in
Microelectronics Reliability
Title in English (abbreviated):
Microelectron Reliab
Place of publication:
Amsterdam
Publisher:
Elsevier
in:
Vol. Vol. 39 (1999), No. 6-7, pp. 975 - 980
ISSN
0026-2714 Show availability online & print
ISSN
1872-941X Show availability online & print
ZDB ID
2022028-5
Type of resource:
Text