Wittpahl, Volker; Ney, Christian; Behnke, Ulf; Mertin, Wolfgang; Kubalek, Erich:
Quantitative high frequency-electric force microscope testing of monolithic microwave integrated circuits at 20 GHz
In: Microelectronics Relability, Vol. Vol. 39 (1999), No. 6-7, pp. 951 - 956
1999article/chapter in journal
Electrical Engineering and Information TechnologyPhysics (incl. Astronomy)Materials Engineering
Title:
Quantitative high frequency-electric force microscope testing of monolithic microwave integrated circuits at 20 GHz
Author:
Wittpahl, VolkerUDE
LSF ID
1454
Other
connected with university
;Ney, Christian;Behnke, UlfUDE
LSF ID
1456
Other
connected with university
;Mertin, WolfgangUDE
LSF ID
1452
ORCID
0000-0001-6792-6033ORCID iD
Other
connected with university
;Kubalek, ErichUDE
LSF ID
1175
Other
connected with university
Year of publication:
1999
Appears in
Microelectronics Relability
in:
Vol. Vol. 39 (1999), No. 6-7, pp. 951 - 956
ISSN
0026-2714 Show availability online & print