Behnke, Ulf; Wand, B.; Mertin, Wolfgang; Kubalek, Erich:
Voltage contrast measurements on sub-micrometer structures with an electric force microscope based test system
In: Microelectronics Reliability, Vol. Vol. 39 (1999), No. 6-7, pp. 969 - 974
1999article/chapter in journal
Electrical Engineering and Information TechnologyPhysics (incl. Astronomy)Materials Engineering
Related: 1 publication(s)
Title:
Voltage contrast measurements on sub-micrometer structures with an electric force microscope based test system
Author:
Behnke, UlfUDE
LSF ID
1456
Other
connected with university
;Wand, B.;Mertin, WolfgangUDE
LSF ID
1452
ORCID
0000-0001-6792-6033ORCID iD
Other
connected with university
;Kubalek, ErichUDE
LSF ID
1175
Other
connected with university
Year of publication:
1999
Appears in
Microelectronics Reliability
Title in English (abbreviated):
Microelectron Reliab
Place of publication:
Amsterdam
Publisher:
Elsevier
in:
Vol. Vol. 39 (1999), No. 6-7, pp. 969 - 974
ISSN
0026-2714 Show availability online & print
ISSN
1872-941X Show availability online & print
ZDB ID
2022028-5
Type of resource:
Text