Weber, Rainer; Mertin, Wolfgang; Kubalek, Erich:
Voltage-influence of biased interconnection line on integrated circuit-internal current contrast measurements via magnetic force microscopy
In: Microelectronics Reliability, Jg. Vol. 40 (2000), Heft 8-10, S. 1389 - 1394
2000Artikel/Aufsatz in ZeitschriftElektrotechnikPhysikMaterialtechnik
Titel:
Voltage-influence of biased interconnection line on integrated circuit-internal current contrast measurements via magnetic force microscopy
Autor(in):
Weber, Rainer; Mertin, WolfgangLSF; Kubalek, ErichLSF
Erscheinungsjahr
2000