Voltage-influence of biased interconnection line on integrated circuit-internal current contrast measurements via magnetic force microscopy
In: Microelectronics Reliability, Vol. Vol. 40 (2000), No. 8-10, pp. 1389 - 1394
2000article/chapter in journal
Electrical Engineering and Information TechnologyPhysics (incl. Astronomy)Materials Engineering
Related: 1 publication(s)
Title:
Voltage-influence of biased interconnection line on integrated circuit-internal current contrast measurements via magnetic force microscopy
Author:
Weber, Rainer;Mertin, WolfgangUDE
- LSF ID
- 1452
- ORCID
- 0000-0001-6792-6033
- Other
- connected with university
- LSF ID
- 1175
- Other
- connected with university
Year of publication:
2000