Hartmann, Claus; Weber, Rainer; Mertin, Wolfgang; Kubalek, Erich; Müller, Anne-Dorothea; Hietschold, Michael:
Simultaneous IC-internal voltage and current measurements via a multi lever Scanning Force Microscope
In: Microelectronics Reliability, Vol. Vol. 42 (2002), No. 9-11, pp. 1759 - 1762
2002article/chapter in journal
Electrical Engineering and Information TechnologyPhysics (incl. Astronomy)Materials Engineering
Related: 1 publication(s)
Title:
Simultaneous IC-internal voltage and current measurements via a multi lever Scanning Force Microscope
Author:
Hartmann, Claus;Weber, Rainer;Mertin, WolfgangUDE
LSF ID
1452
ORCID
0000-0001-6792-6033ORCID iD
Other
connected with university
;Kubalek, ErichUDE
LSF ID
1175
Other
connected with university
;Müller, Anne-Dorothea;Hietschold, Michael
Year of publication:
2002
Appears in
Microelectronics Reliability
Title in English (abbreviated):
Microelectron Reliab
Place of publication:
Amsterdam
Publisher:
Elsevier
in:
Vol. Vol. 42 (2002), No. 9-11, pp. 1759 - 1762
ISSN
0026-2714 Show availability online & print
ISSN
1872-941X Show availability online & print
ZDB ID
2022028-5
Type of resource:
Text