Towards the the implanting of ions and nanoparticles with nm spatial resolution
In: Applied Physics A : Materials Science and Processing, Vol. 91 (2008), No. 4, pp. 567 - 571
Title:
Towards the the implanting of ions and nanoparticles with nm spatial resolution
Author:
Meijer, Jan;Pezzagna, Sébastien;Vogel, Thomas;Burchard, Bernard;Bukow, Hans-Heinrich;Rangelow, Ivo W.;Sarov, Yanko;Wiggers, HartmutUDE
- GND
- 172637171
- LSF ID
- 1643
- ORCID
- 0000-0001-8487-9937
- Other
- connected with university
- LSF ID
- 10016
- Other
- connected with university
Year of publication:
2008