Gupta, Anoop; Wiggers, Hartmut:
Microwave plasma synthesis of undoped and doped silicon nanoparticles
In: European Materials Research Society Spring Meeting - Straßburg (Frankreich), 2009
2009Buchaufsatz/Kapitel in SammelwerkMaschinenbau
Titel:
Microwave plasma synthesis of undoped and doped silicon nanoparticles
Autor(in):
Gupta, AnoopLSF; Wiggers, HartmutLSF