Stella, Kevin; Bürstel, Damian; Franzka, Steffen; Diesing, Detlef; Posth, Oliver:
Preparation and properties of thin amorphous tantalum films formed by small e-beam evaporators
In: Journal of Physics D : Applied Physics (2009), No. 42, p. 135417
2009article/chapter in journal
Chemistry
Related: 1 publication(s)
Title in English:
Preparation and properties of thin amorphous tantalum films formed by small e-beam evaporators
Author:
Stella, KevinUDE
LSF ID
49841
Other
connected with university
;
Bürstel, DamianUDE
LSF ID
52512
Other
connected with university
;
Franzka, SteffenUDE
LSF ID
11103
Other
connected with university
;
Diesing, DetlefUDE
LSF ID
11102
ORCID
0000-0002-5587-2557ORCID iD
Other
connected with university
;
Posth, OliverUDE
LSF ID
13424
Other
connected with university
Year of publication:
2009
Language of text:
English