Preparation and properties of thin amorphous tantalum films formed by small e-beam evaporators
In: Journal of Physics D : Applied Physics (2009), No. 42, p. 135417
Title in English:
Preparation and properties of thin amorphous tantalum films formed by small e-beam evaporators
Author:
Stella, KevinUDE
- LSF ID
- 49841
- Other
- connected with university
- LSF ID
- 52512
- Other
- connected with university
- LSF ID
- 11103
- Other
- connected with university
- LSF ID
- 11102
- ORCID
- 0000-0002-5587-2557
- Other
- connected with university
- LSF ID
- 13424
- Other
- connected with university
Year of publication:
2009
Language of text:
English