Jnawali, Giriraj; Meyer zu Heringdorf, Frank; Wall, Dirk; Sindermann, Simon; Horn-von Hoegen, Michael:
Stable tungsten disilicide contacts for surface and thin film resistivity measurements
In: Journal of Vacuum Science and Technology (JVST) B : Nanotechnology and Microelectronics, Vol. 27 (2009), No. 1, p. 180
2009article/chapter in journal
Physics (incl. Astronomy)Faculty of Physics » Experimental PhysicsScientific institutes » Center for Nanointegration Duisburg-Essen (CENIDE)
Related: 1 publication(s)
Title in English:
Stable tungsten disilicide contacts for surface and thin film resistivity measurements
Author:
Jnawali, GirirajUDE
LSF ID
10417
ORCID
0000-0003-0954-8614ORCID iD
Other
connected with university
;Meyer zu Heringdorf, FrankUDE
LSF ID
48700
ORCID
0000-0002-5878-2012ORCID iD
Other
connected with university
;Wall, DirkUDE
LSF ID
48960
Other
connected with university
;Sindermann, SimonUDE
LSF ID
51046
Other
connected with university
;Horn-von Hoegen, MichaelUDE
GND
1201039908
LSF ID
10366
ORCID
0000-0003-0324-3457ORCID iD
Other
connected with university
Year of publication:
2009
DOI
10.1116/1.3071851
Language of text:
English
Appears in
Journal of Vacuum Science and Technology (JVST) B : Nanotechnology and Microelectronics
Place of publication:
New York
Publisher:
American Vacuum Society (AVS)
in:
Vol. 27 (2009), No. 1, p. 180
ISSN
2166-2754 Show availability online & print
ISSN
2166-2746 Show availability online & print
ISSN
1071-1023 Show availability online & print
ZDB ID
3117331-7
Library shelfmark:
67 Z 23