Kury, Peter; Hild, R.; Thien, Dagmar; Günter, H.-L.; Meyer zu Heringdorf, Frank; Horn-von Hoegen, Michael:
Compact and transferable threefold evaporator for molecular beam epitaxy in ultrahigh vacuum
In: Review of Scientific Instruments, Jg. 76 (2005), Heft 8, 83906 (5p)
2005Artikel/Aufsatz in Zeitschrift
Physik (inkl. Astronomie)Fakultät für Physik » Experimentalphysik
Damit verbunden: 1 Publikation(en)
Titel:
Compact and transferable threefold evaporator for molecular beam epitaxy in ultrahigh vacuum
Autor*in:
Kury, Peter;Hild, R.;Thien, DagmarUDE
LSF ID
10445
Sonstiges
der Hochschule zugeordnete*r Autor*in
;
Günter, H.-L.;Meyer zu Heringdorf, FrankUDE
LSF ID
48700
ORCID
0000-0002-5878-2012ORCID iD
Sonstiges
der Hochschule zugeordnete*r Autor*in
;
Horn-von Hoegen, MichaelUDE
GND
1201039908
LSF ID
10366
ORCID
0000-0003-0324-3457ORCID iD
Sonstiges
der Hochschule zugeordnete*r Autor*in
Erscheinungsjahr:
2005

Abstract:

A very compact molecular beam epitaxy (MBE) source is presented. It contains three Knudsen-type crucibles, two resistively and one electron bombardment heated. An efficient water cooling is implemented to allow MBE deposition under ultrahigh-vacuum conditions. Due to its small size, the evaporator fits inside a DN 36 CF T-piece which makes a separate bakeout possible. Refills of the crucibles as well as changes of the source materials and even repairs of the source can be carried out within a few hours without breaking the vacuum of the main chamber. The design and the usage of the MBE source are described in detail and its functionality is demonstrated exemplarily with data of silver deposition on the silicon (111) surface.