Precise calibration for surface stress induced optical deflection measurements
In: Review of Scientific Instruments, Vol. 75 (2004), No. 6, 2211 (2p)
2004article/chapter in journal
Physics (incl. Astronomy)Faculty of Physics » Experimental Physics
Related: 1 publication(s)
Title:
Precise calibration for surface stress induced optical deflection measurements
Author:
Kury, Peter;Zahl, P.;Horn-von Hoegen, MichaelUDE
- GND
- 1201039908
- LSF ID
- 10366
- ORCID
-
0000-0003-0324-3457
- Other
- connected with university
Year of publication:
2004
Appears in
Title in English (abbreviated):
Rev. Sci. Instrum.
Title in English (abbreviated):
Rev. of Sci. Instrum.
Place of publication:
Melville
Publisher:
American Institute of Physics (AIP)
in:
Vol. 75 (2004), No. 6, 2211 (2p)
ISSN
ISSN
ZDB ID
Library shelfmark:
Abstract:
Bending sample methods, like surface stress induced optical deflection, are powerful tools for the in situ determination of thin film and surface stress: the bending radius of a sample is measured via the deflection of reflected laser beams. In most setups split-segment position sensitive detectors are used. A precise method for calibrating those detectors is presented