Tromp, R.M.; Copel, Matthew; Reuter, M.C.; Horn-von Hoegen, Michael; Speidell, J.:
A new two-dimensional particle detector for a toroidal electrostatic analyzer
In: Review of Scientific Instruments, Vol. 62 (1991), No. 11, p. 2679
1991article/chapter in journal
Physics (incl. Astronomy)Faculty of Physics » Experimental Physics
Related: 1 publication(s)
Title:
A new two-dimensional particle detector for a toroidal electrostatic analyzer
Author:
Tromp, R.M.;Copel, Matthew;Reuter, M.C.;Horn-von Hoegen, MichaelUDE
GND
1201039908
LSF ID
10366
ORCID
0000-0003-0324-3457ORCID iD
Other
connected with university
;
Speidell, J.
Year of publication:
1991

Abstract:

We describe a new two‐dimensional detector for the detection of ions scattered from a solid target, analyzed in energy and scattering angle by a toroidal electrostatic analyzer. The detector resolves the scattering angle with a resolution of 0.4° over a range of 25°, and the ion energy with a resolution of 120 eV over a range of 2000 eV, at 100 keV ion energy. The energy resolution of the spectrometer was improved with a factor 4 relative to its previous performance with a one‐dimensional scattering angle detector, while−at the same time−the dose efficiency (count/μC) was improved by a factor 5–10