Entwicklung eines MEMS-Drucksensor-Prozessmoduls für die Post-CMOS-Integration
Duisburg, Essen, 2012
2012dissertation
Electrical Engineering and Information TechnologyFaculty of Engineering » Engineering and Information Technology » Elektronische Bauelemente und Schaltungen
Title in German:
Entwicklung eines MEMS-Drucksensor-Prozessmoduls für die Post-CMOS-Integration
Author:
Wang, Qiang
Thesis advisor:
Vogt, HolgerUDE
- GND
- 1150723521
- LSF ID
- 1998
- ORCID
-
0000-0001-8006-8598
- Other
- connected with university
Place of publication:
Duisburg, Essen
Year of publication:
2012
DuEPublico 1 ID
Library shelfmark:
Note:
Duisburg, Essen, Univ., Diss., 2012
Language of text:
German