Jain, Himani Gaur:
Synthesis and characterization of carbon nanowalls by ICP CVD using aluminium acetylacetonate precursor
Duisburg, Essen, 2012
2012dissertation
Physics (incl. Astronomy)Faculty of Physics
Title in English:
Synthesis and characterization of carbon nanowalls by ICP CVD using aluminium acetylacetonate precursor
Author:
Jain, Himani Gaur
Thesis advisor:
Buck, VolkerUDE
GND
173074383
LSF ID
10489
Other
connected with university
Place of publication:
Duisburg, Essen
Year of publication:
2012
Extent:
XIV, 111 Bl.
DuEPublico 1 ID
Library shelfmark:
Note:
Duisburg, Essen, Univ., Diss., 2012
Language of text:
English

Abstract in English:

A new method of synthesis of carbon nanowalls using acetylacetonate as metal organic precursor is presented. The films were deposited in ICP-CVD generated argon plasma by varying gas flow rate, plasma power, substrate temperature and reactor pressure. The precursor-feeding rate into the plasma chamber was controlled by the argon gas flow. No catalyst or other carbon gas source was added to deposit such structures. The wall size of CNWs was strongly influenced by the aluminium content present inside the film, plasma parameters like substrate temperature, plasma power and gas flow rate. The smallest wall size observed was 5nm. All films were analysed using SEM, XRD, Raman and TEM techniques in order to characterize the morphology of the samples. XPS, EDX, SIMS, and NRA were used for chemical analysis. The structuring of CNW layers was performed successfully with a pulsed power laser. The resulting cathodes exhibited fairly aligned and efficient field emission (FE) at onset fields for 1 nA of 10-20 V/μm. Local FE measurements of selected CNW patches revealed promising maximum current values up to about 100 μA. Aluminium oxide films were observed when deposited in oxygen/argon plasma.