Non-contact fluorescence measurements for inspection and imprint depth control in nanoimprint lithography
In: Proceedings / 18th European Conference on Mask Technology for Integrated Circuits and Microcomponents / Behringer, Uwe F. W. (Hrsg.). - 18th European Conference on Mask Technology for Integrated Circuits and Microcomponents : 15 - 16 November 2002, Munich, Germany - Bellingham, Wash.: SPIE, 2002 - (Proceedings / SPIE, International Society for Optical Engineering ; 4764), S. 195
2002Buchaufsatz/Kapitel in Tagungsband
Chemie
Titel in Englisch:
Non-contact fluorescence measurements for inspection and imprint depth control in nanoimprint lithography
Autor*in:
Finder, C.;Mayer, ChristianUDE
- GND
- 100307078
- LSF ID
- 501
- ORCID
-
0000-0003-1681-0553
- Sonstiges
- der Hochschule zugeordnete*r Autor*in
Sprache des Textes:
Englisch