Pulsed laser sources with high repetition rates, high beam quality and pulse-to-pulse stability are available since few years. These sources can be applied to micro-anal. scanning techniques requiring high no. of laser pulses in a short time, low signal deviation and good focusability. A scanning laser-induced optical emission spectrometer (Laser-OES) using such a laser source was built up and applied to steel cleanness anal. This novel anal. technique enables to distinguish between different inclusion types based on their chem. compns. Coincidences of high intensity peaks for single elements at the same coordinates can be connected to specific inclusion types.