Precise calibration for surface stress induced optical deflection measurements
In: Review of Scientific Instruments, Jg. 75 (2004), Heft 6, 2211 (2p)
2004Artikel/Aufsatz in Zeitschrift
Physik (inkl. Astronomie)Fakultät für Physik » Experimentalphysik
Damit verbunden: 1 Publikation(en)
Titel:
Precise calibration for surface stress induced optical deflection measurements
Autor*in:
Kury, Peter;Zahl, P.;Horn-von Hoegen, MichaelUDE
- GND
- 1201039908
- LSF ID
- 10366
- ORCID
- 0000-0003-0324-3457
- Sonstiges
- der Hochschule zugeordnete*r Autor*in
Erscheinungsjahr:
2004
Abstract:
Bending sample methods, like surface stress induced optical deflection, are powerful tools for the in situ determination of thin film and surface stress: the bending radius of a sample is measured via the deflection of reflected laser beams. In most setups split-segment position sensitive detectors are used. A precise method for calibrating those detectors is presented