Silicon Particle Formation by pyrolysis of Silane in a Hot Wall Gasphase Reactor
In: Chemical Engineering and Technology : CET, Vol. 24 (2001), No. 3, pp. 261 - 264
Title:
Silicon Particle Formation by pyrolysis of Silane in a Hot Wall Gasphase Reactor
Author:
Wiggers, HartmutUDE
- GND
- 172637171
- LSF ID
- 1643
- ORCID
-
0000-0001-8487-9937
- Other
- connected with university
- LSF ID
- 1624
- Other
- connected with university
- LSF ID
- 1010
- Other
- connected with university
Year of publication:
2001
Appears in
Title in English (abbreviated):
Chem. Eng. Technol.
Place of publication:
Weinheim
Publisher:
Wiley
in:
Vol. 24 (2001), No. 3, pp. 261 - 264
ISSN
ISSN
ZDB ID
Note:
ab 10.1987