Utz, Alexander; Walk, Christian; Stanitzki, Alexander; Mokhtari, Mir; Kraft, Michael; Kokozinski, Rainer:
A High-Precision and High-Bandwidth MEMS-based Capacitive Accelerometer
In: IEEE Sensors Journal (J-SEN), Vol. 18 (2018), No. 16, pp. 6533 - 6539
2018article/chapter in journalOA Green
Electrical Engineering and Information TechnologyFaculty of Engineering » Engineering and Information Technology » Elektronische Bauelemente und Schaltungen
Related: 1 publication(s)
Title in English:
A High-Precision and High-Bandwidth MEMS-based Capacitive Accelerometer
Author:
Utz, Alexander
;Walk, Christian
;Stanitzki, Alexander
;Mokhtari, Mir
;Kraft, MichaelUDE
LSF ID
54706
Other
connected with university
;Kokozinski, RainerUDE
GND
173084451
LSF ID
50200
ORCID
0000-0003-3416-3310ORCID iD
Other
connected with university
Year of publication:
2018
Open Access?:
OA Green
DOI
10.1109/JSEN.2018.2849873
IEEE ID
8392718
Scopus ID
85049092602
WWW URL:
http://publica.fraunhofer.de/bitstreams/e5d9077c-488f-4a9a-80b0-d2435615df9f/download
Language of text:
English
Appears in
IEEE Sensors Journal (J-SEN)
Title in English (abbreviated):
IEEE Sensors J.
Place of publication:
Piscataway
Publisher:
Institute of Electrical and Electronics Engineers (IEEE)
in:
Vol. 18 (2018), No. 16, pp. 6533 - 6539
ISSN
1558-1748 Show availability online & print
ISSN
1530-437X Show availability online & print
ZDB ID
2052059-1
Keyword, Topic:
1f noise ; accelerometer ; Accelerometers ; capacitive sensing ; Capacitive sensors ; Gain ; low-noise ; MEMS ; Micromechanical devices ; Sensor systems