Health risks of nanoparticulate emissions during femtosecond and picosecond pulsed laser machining
In: Laser Applications in Microelectronic and Optoelectronic Manufacturing VII : 26 - 29 January 2009, San Jose, California, United States / Meunier, Michel; Holmes, Andrew S.; Niino, Hiroyuki; Gu, Bo (Eds.). - Laser Applications in Microelectronic and Optoelectronic Manufacturing VII ; [part of] Photonics West ; 26 - 29 January 2009, San Jose, California, United States - Bellingham: SPIE, 2009 - (Proceedings of SPIE ; 7201), p. 720109
2009book article/chapter in Proceedings
ChemistryFaculty of Chemistry » Technische Chemie
Title in English:
Health risks of nanoparticulate emissions during femtosecond and picosecond pulsed laser machining
Author:
Barcikowski, StephanUDE
- GND
- 129006084
- LSF ID
- 52773
- ORCID
- 0000-0002-9739-7272
- Other
- connected with university
Language of text:
English