Zhao, Chun; Montaseri, Mohammad Hassan; Wood, Graham S.; Pu, Suan Hui; Seshia, Ashwin A.; Kraft, Michael:
A review on coupled MEMS resonators for sensing applications utilizing mode localization
In: Sensors and Actuators A : Physical, Vol. 249 (2016), pp. 93 - 111
2016article/chapter in journal
Electrical Engineering and Information TechnologyFaculty of Engineering » Engineering and Information Technology » Elektronische Bauelemente und Schaltungen
Related: 1 publication(s)
Title in English:
A review on coupled MEMS resonators for sensing applications utilizing mode localization
Author:
Zhao, Chun
;Montaseri, Mohammad HassanUDE
LSF ID
55868
Other
connected with university
;Wood, Graham S.
;Pu, Suan Hui
;Seshia, Ashwin A.
;Kraft, MichaelUDE
LSF ID
54706
Other
connected with university
Year of publication:
2016
DOI
10.1016/j.sna.2016.07.015
Scopus ID
84984645061
Language of text:
English
Appears in
Sensors and Actuators A : Physical
Place of publication:
Amsterdam
Publisher:
Elsevier
in:
Vol. 249 (2016), pp. 93 - 111
ISSN
0924-4247 Show availability online & print
ISSN
1873-3069 Show availability online & print
ZDB ID
1500729-7
Keyword, Topic:
Common mode rejection ; Coupled resonator ; High sensitivity ; MEMS resonant sensors ; Vibration mode localization