Utz, Alexander; Walk, Christian; Stanitzki, Alexander; Mokhtari, Mir; Kraft, Michael; Kokozinski, Rainer:
A high precision MEMS based capacitive accelerometer for seismic measurements
In: IEEE Sensors 2017 : October 29-November 1, 2017, Glasgow, Scotland, UK, Scottish Event Campus (SEC) ; 2017 conference proceedings - IEEE SENSORS Conference ; October 29-November 1, 2017, Glasgow, Scotland, UK - Piscataway: IEEE, 2017
2017book article/chapter in Proceedings
Electrical Engineering and Information TechnologyFaculty of Engineering » Engineering and Information Technology » Elektronische Bauelemente und Schaltungen
Title in English:
A high precision MEMS based capacitive accelerometer for seismic measurements
Author:
Utz, Alexander
;Walk, Christian
;Stanitzki, Alexander
;Mokhtari, Mir
;Kraft, MichaelUDE
LSF ID
54706
Other
connected with university
;Kokozinski, RainerUDE
GND
173084451
LSF ID
50200
ORCID
0000-0003-3416-3310ORCID iD
Other
connected with university
DOI
10.1109/ICSENS.2017.8233981
IEEE ID
8233981
Scopus ID
85044282930
Language of text:
English
Appears in
IEEE Sensors 2017 : October 29-November 1, 2017, Glasgow, Scotland, UK, Scottish Event Campus (SEC) ; 2017 conference proceedings
Conference
IEEE SENSORS Conference ; October 29-November 1, 2017, Glasgow, Scotland, UK
Place of publication:
Piscataway
Publisher:
IEEE
Year of publication:
2017
ISBN
978-1-5386-4056-2
ISBN
978-1-5090-1012-7
ISBN
978-1-5090-1013-4
Keyword, Topic:
accelerometer ; capacitive sensing ; low noise ; MEMS