X-ray characterization of buried delta layers
In: Surface Review and Letters, Vol. 5 (1998), pp. 145 - 149
1998article/chapter in journal
Physics (incl. Astronomy)Faculty of Physics » Experimental Physics
Title:
X-ray characterization of buried delta layers
Author:
Falta, J.;Bahr, D.;Materlik, G.;Müller, B.H.;Horn-von Hoegen, MichaelUDE
- GND
- 1201039908
- LSF ID
- 10366
- ORCID
- 0000-0003-0324-3457
- Other
- connected with university
Year of publication:
1998
Abstract:
A combination of measurements of crystal truncation roda and X-ray standing waves has been used for a detailed characterization of buried Ge δ layers on Si(001). Measurements of crystal truncation rods reveal the interface roughness, the δ layer lattice constant and the δ layer concentration. From measurements with X-ray standing waves the dopant lattice position and crystallinity of the δ layer are determined. We find a linear dependence of the local tetragonal distortion of the Ge bonding in the δ layer on the Ge concentration in the layer.