Walk, Christian; Goehlich, Andreas; Giese, Andre; Görtz, Michael; Vogt, Holger; Kraft, Michael:
Investigation of diaphragm deflection of an absolute MEMS capacitive polysilicon pressure sensor
In: Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems : Barcelona, Spain ; 4 - 6 May 2015, Barcelona, Spain ; [part of SPIE microtechnologies] / Sánchez-Rojas, José Luis; Brama, Riccardo (Eds.). - Conference on Smart Sensors, Actuators, and MEMS; and Cyber Physical Systems ; 4 - 6 May 2015, Barcelona, Spain - Bellingham: SPIE, 2015 - (Proceedings of SPIE ; 9517), Article 95170T
2015book article/chapter in Proceedings
Materials EngineeringElectrical Engineering and Information TechnologyFaculty of Engineering » Engineering and Information Technology » Elektronische Bauelemente und Schaltungen
Title in English:
Investigation of diaphragm deflection of an absolute MEMS capacitive polysilicon pressure sensor
Author:
Walk, Christian
;Goehlich, Andreas
;Giese, Andre
;Görtz, Michael
;Vogt, HolgerUDE
GND
1150723521
LSF ID
1998
ORCID
0000-0001-8006-8598ORCID iD
Other
connected with university
;Kraft, MichaelUDE
LSF ID
54706
Other
connected with university
DOI
10.1117/12.2176188
Scopus ID
84954144581
Language of text:
English
Appears in
Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems : Barcelona, Spain ; 4 - 6 May 2015, Barcelona, Spain ; [part of SPIE microtechnologies]
Conference
Conference on Smart Sensors, Actuators, and MEMS; and Cyber Physical Systems ; 4 - 6 May 2015, Barcelona, Spain
Editor:
Sánchez-Rojas, José Luis;Brama, Riccardo
Place of publication:
Bellingham
Publisher:
SPIE
Year of publication:
2015
in:
Article 95170T
ISBN
978-1-62841-639-8
In Series
Proceedings of SPIE
in:
Vol. 9517