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Journal of Vacuum Science and Technology (JVST) B : Nanotechnology and Microelectronics
UB
University bibliography
Entry no. 206087
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Journal of Vacuum Science and Technology (JVST) B : Nanotechnology and Microelectronics
journal
Electrical Engineering and Information Technology
Related:
6 publication(s)
Title in English:
Journal of Vacuum Science and Technology (JVST) B : Nanotechnology and Microelectronics
Place of publication:
New York
Publisher:
American Vacuum Society (AVS)
ISSN
2166-2754
ISSN
2166-2746
ISSN
1071-1023
ZDB ID
3117331-7
Library shelfmark:
67 Z 23