Voltage contrast measurements on sub-micrometer structures with an electric force microscope based test system
In: Microelectronics Reliability, Vol. Vol. 39 (1999), No. 6-7, pp. 969 - 974
1999article/chapter in journal
Electrical Engineering and Information TechnologyPhysics (incl. Astronomy)Materials Engineering
Related: 1 publication(s)
Title:
Voltage contrast measurements on sub-micrometer structures with an electric force microscope based test system
Author:
Behnke, UlfUDE
- LSF ID
- 1456
- Other
- connected with university
- LSF ID
- 1452
- ORCID
- 0000-0001-6792-6033
- Other
- connected with university
- LSF ID
- 1175
- Other
- connected with university
Year of publication:
1999