Behnke, Ulf; Mertin, Wolfgang; Kubalek, Erich:
Cross-talk in electric force microscopy testing of parallel sub-micrometer conducting lines
In: Microelectronics Reliability, Vol. Vol. 40 (2000), No. 8-10, pp. 1401 - 1406
2000article/chapter in journal
Electrical Engineering and Information TechnologyPhysics (incl. Astronomy)Materials Engineering
Related: 1 publication(s)
Title:
Cross-talk in electric force microscopy testing of parallel sub-micrometer conducting lines
Author:
Behnke, UlfUDE
LSF ID
1456
Other
connected with university
;Mertin, WolfgangUDE
LSF ID
1452
ORCID
0000-0001-6792-6033ORCID iD
Other
connected with university
;Kubalek, ErichUDE
LSF ID
1175
Other
connected with university
Year of publication:
2000
Appears in
Microelectronics Reliability
Title in English (abbreviated):
Microelectron Reliab
Place of publication:
Amsterdam
Publisher:
Elsevier
in:
Vol. Vol. 40 (2000), No. 8-10, pp. 1401 - 1406
ISSN
0026-2714 Show availability online & print
ISSN
1872-941X Show availability online & print
ZDB ID
2022028-5
Type of resource:
Text