Quantitative high frequency-electric force microscope testing of monolithic microwave integrated circuits at 20 GHz
In: Microelectronics Relability, Vol. Vol. 39 (1999), No. 6-7, pp. 951 - 956
1999article/chapter in journal
Electrical Engineering and Information TechnologyPhysics (incl. Astronomy)Materials Engineering
Title:
Quantitative high frequency-electric force microscope testing of monolithic microwave integrated circuits at 20 GHz
Author:
Wittpahl, VolkerUDE
- LSF ID
- 1454
- Other
- connected with university
- LSF ID
- 1456
- Other
- connected with university
- LSF ID
- 1452
- ORCID
- 0000-0001-6792-6033
- Other
- connected with university
- LSF ID
- 1175
- Other
- connected with university
Year of publication:
1999