Finder, C.; Beck, M.; Seekamp, J.; Pfeiffer, K.; Carlberg, P.; Maximov, I.; Reuther, F.; Sarve, E.l.; Zankovich, S.; Ahopelto, J.; Montelius, L.; Mayer, Christian; Sotomayor Torres, C.m.:
Fluorescence microscopy for quality control in nanoimprint lithography
In: Microelectronic Engineering, Vol. 67-68 (2003), pp. 623 - 628
2003article/chapter in journal
Chemistry
Related: 1 publication(s)
Title in English:
Fluorescence microscopy for quality control in nanoimprint lithography
Author:
Finder, C.;Beck, M.;Seekamp, J.;Pfeiffer, K.;Carlberg, P.;Maximov, I.;Reuther, F.;Sarve, E.l.;Zankovich, S.;Ahopelto, J.;Montelius, L.;Mayer, ChristianUDE
GND
100307078
LSF ID
501
ORCID
0000-0003-1681-0553ORCID iD
Other
connected with university
;Sotomayor Torres, C.m.
Year of publication:
2003
DOI
10.1016/S0167-9317(03)00123-0
Language of text:
English
Appears in
Microelectronic Engineering
Title in English (abbreviated):
Microelectron Eng
Place of publication:
Amsterdam
Publisher:
Elsevier
in:
Vol. 67-68 (2003), pp. 623 - 628
ISSN
0167-9317 Show availability online & print
ISSN
1873-5568 Show availability online & print
ZDB ID
1497065-X
Type of resource:
Text