Fabrication of High Density Dot Lattices with Electron Beam Lithography.

Stahlmecke, Burkhard; Dumpich, Günter:

In: Phase Transitions, Vol. 78 (2005), No. 1-3, p. 105

2005article/chapter in journal

Physics (incl. Astronomy)

Title:

Fabrication of High Density Dot Lattices with Electron Beam Lithography.

Author:

Stahlmecke, Burkhard;Dumpich, Günter^UDE

Year of publication:

2005

Appears in

Publisher:

Taylor & Francis

in:

Vol. 78 (2005), No. 1-3, p. 105

ISSN

ISSN

ZDB ID

ZDB ID

Library shelfmark:

University bibliography