Diffractive/refractive (hybrid) UV-imaging system for minimally invasive metrology : Design, performance, and application experiments
In: Applied Optics, Vol. 51 (2012), No. 12, pp. 1982 - 1996
2012article/chapter in journal
Mechanical EngineeringFaculty of Engineering » Maschinenbau und Verfahrenstechnik » Institute for Energy and Materials Processes (EMPI) » Reactive Fluids
Related: 1 publication(s)
Title in English:
Diffractive/refractive (hybrid) UV-imaging system for minimally invasive metrology : Design, performance, and application experiments
Author:
Reichle, René
- LSF ID
- 49364
- Other
- connected with university
- GND
- 1148037985
- LSF ID
- 48807
- ORCID
- 0000-0002-6879-4826
- Other
- connected with university
Year of publication:
2012
Scopus ID
Language of text:
English